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Description
The shear force sensor developed in this study has pressure insensitivity, high sensitivity, and bi-directional measurements, and it was fabricated on a flexible substrate. This sensor was fabricated by applying a polymer based pillar structure to the Planar Hall Magnetoresistance (PHMR) sensing element. The column structure was placed on the PHMR sensing element to minimize the effect of normal force and improve the sensor's ability to detect shear force. Signal monitoring has been simplified to enable precise and accurate measurements. The sensitivity of this sensor is 500 times greater than its normal force sensitivity, providing evidence of accurate shear force measurements. The sensor exhibits non-hysteretic behavior and excellent repeatability, confirming its reliability and stability. By utilizing the sensor's characteristics for shear force measurement, we demonstrate its suitability for practical experiments such as flow velocity measurement and Braille recognition. The shear force sensor that consistently perform well in various environments show potential for fields such as AI robots, wearable devices, and medical equipment that require precise control and sensing.
Acknowledgements
The authors acknowledge funding from the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIT) (Grant No. NRF-2018R1A5A1025511) and in part by the R&D program of MOTIE (Grant No. 20011264).
References
[1] M. Kim et al., “Pressure-insensitive magnetic shear force sensor with pillar structure for versatile application,” Applied Materials Today, vol. 36. Elsevier BV, p. 102076, Feb. 2024. doi: 10.1016/j.apmt.2024.102076.
[2] J. Lee et al., “Bridge Resistance Compensation for Noise Reduction in a Self-Balanced PHMR Sensor,” Sensors, vol. 21, no. 11. MDPI AG, p. 3585, May 21, 2021. doi: 10.3390/s21113585.
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